MANUFACTURING METHOD OF AL-SI ALLOY FILMS

摘要

A method for forming an Al-Si alloy film having high reflectivity and superior corrosion resistance at high temperature by controlling silicon content of an Al-Si alloy in a crucible and controlling electric power of an electron beam, thereby evaporating the Al-Si alloy at a proper evaporation rate is provided. A manufacturing method of an Al-Si alloy film comprises: a vacuum process(S11) of vacuuming a vacuum chamber within a vacuum deposition equipment to a range of 10^-2 to 10^-5 torr; a substrate cleaning process(S11) of injecting argon gas into the vacuum chamber and applying a negative voltage of 400 to 1000 V to a substrate mounted on a substrate holder installed within the vacuum chamber, thereby glow discharging the substrate to clean the substrate; a substrate heating process(S13) of heating the substrate to a temperature range of 200 to 350 deg.C to form a film on the substrate cleaned by the substrate cleaning process; and an evaporation depositing process(S14) of evaporating an evaporation material within an alumina crucible by controlling an electron beam power to 2.5 to 4.0 kW to obtain a preset evaporation rate when the substrate is heated, and depositing the evaporate Al-Si alloy evaporated for a determined time by opening a shutter when the electron beam power has a preset power value.