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发明名称
Metal compound solution and thin film formation using the same
摘要
申请公布号
KR100686431(B1)
申请公布日期
2007.02.23
申请号
KR20010007467
申请日期
2001.02.15
申请人
发明人
分类号
C07C49/92;C07F7/00;C07F7/24;C07F7/28;C23C16/40;H01L21/31;H01L21/316
主分类号
C07C49/92
代理机构
代理人
主权项
地址
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