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发明名称
Method for ZnO thin film doped with metal using magnetron sputtering method
摘要
申请公布号
KR20070021342(A)
申请公布日期
2007.02.23
申请号
KR20050075491
申请日期
2005.08.18
申请人
发明人
分类号
H01L33/00
主分类号
H01L33/00
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代理人
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