SPUTTER ELECTRODE AND SPUTTERING APPARUTUS HAVING THE SPUTTER ELECTRODE,申请号KR20060076092-传众专利搜索

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发明名称	SPUTTER ELECTRODE AND SPUTTERING APPARUTUS HAVING THE SPUTTER ELECTRODE
摘要
申请公布号	KR20070021919(A)	申请公布日期	2007.02.23
申请号	KR20060076092	申请日期	2006.08.11
申请人		发明人
分类号	C23C14/35;C23C14/34	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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