| 摘要 |
<P>PROBLEM TO BE SOLVED: To make a piezoelectric vibrator wherein a board is made thin to form a vibration region more compact than a conventional one entirely in comparison to an obtained vibration performance, by improving a space efficiency of materials thereof so as to obtain a compact piezoelectric device. <P>SOLUTION: The piezoelectric device 30 is formed by jointing the piezoelectric vibrator 31 in which piezoelectric materials are subject to wet etching to provide a vibration region 34 with a thin board to a package 80 or case. The piezoelectric device provides a joint to the package or case in regions 35, 36 in which an etching delay is generated by performing the wet etching to the approximately entire regions to be used as the piezoelectric vibrator of the piezoelectric materials, based on an etching anisotropy by the wet etching. <P>COPYRIGHT: (C)2007,JPO&INPIT |
