ACTUATOR, LIQUID SPRAY HEAD AND LIQUID SPRAYING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an actuator capable of obtaining large distortion with small driving voltage, and to provide a liquid spray head and a liquid spraying device. SOLUTION: The actuator includes a piezoelectric element provided via a diaphragm provided on one of planes of a substrate and comprising a lower electrode, a piezoelectric layer, and an upper electrode. A ratio d31/S11Eof a piezoelectric constant d31of the piezoelectric layer and elastic compliance S11Eof the piezoelectric layer is larger than 5 C/m2, and the elastic compliance S11Eof the diaphragm is larger than 2×10-8m2/N. COPYRIGHT: (C)2007,JPO&INPIT