| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processor where in-substrate plane uniformity of a substrate processing amount can be improved and intensity of a fixing part of a strut and an annular plate can be improved without increasing a size, and to provide a substrate holder. SOLUTION: A boat 217 includes at least three struts 15 which are almost vertically installed; a plurality of wafer supports 16 which are installed in the struts 15 for multiple stages, and on which a plurality of wafers 200 are almost horizontally placed at prescribed intervals; a plurality of annular plates 13 which are almost horizontally installed with respect to the wafers 200 supported by the wafer supports 16 at prescribed intervals; and a plurality of plate notches 25 which are disposed on opposite side of the wafers 200 supported by the wafer supports 16 of the struts 15, and on which inner peripheral faces of a plurality of the annular plates 13 are placed. The annular plates 13 are placed on the plate notches 25 so as to be fixed. COPYRIGHT: (C)2007,JPO&INPIT |
