| 摘要 |
PROBLEM TO BE SOLVED: To extend the lifetime of a lamp by preventing occurrence of cracks due to deterioration by ultraviolet rays on a quartz glass discharge container of an excimer lamp. SOLUTION: A solvent containing an ultraviolet absorption substance is coated on the outside cylindrical face of an internal tube 1 made of quartz glass of an excimer lamp. By drying the solvent, a film of the ultraviolet absorption substance is formed, then, a heat treatment is applied with a temperature of 900°C or more and softening point or less of the internal tube, thereby, the ultraviolet absorption substance is diffused inside the quartz glass from the outside cylindrical face of the internal tube. The film of the ultraviolet absorption substance is removed by performing hydrofluoric acid cleaning. The substance diffused is any one kind or more of Ti, Ce, Zr. The density of diffusion is thicker on the side closer to the discharge space. Since it prevents entering of ultraviolet rays into the internal tube 1, lifetime of the lamp can be extended. COPYRIGHT: (C)2007,JPO&INPIT
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