| 摘要 |
PROBLEM TO BE SOLVED: To obtain a cleaning system using persulfuric acid where the concentration of persulfuric acid is sufficiently increased to increase cleaning effect, and further, cleaning can be continued without requiring the addition of hydrogen peroxide. SOLUTION: The sulfuric acid recycle type cleaning system comprises: a cleaning tank 1 of cleaning the material 30 to be cleaned with a persulfuric acid solution 2 as a cleaning liquid; an electrolytic reaction tanks 10a, 10b of producing persulfuric acid ions from sulfuric acid ions comprised in the solution and regenerating a persulfuric acid solution; and circulation lines 4, 5, 6 of circulating the persulfuric acid solution among the cleaning tank 1 and the electrolytic reaction tanks 10a, 10b. Repeatedly utilizing a sulfuric acid solution, a persulfuric acid solution is regenerated on a site by an electrolytic reaction device so as to be used for cleaning. Further, the extracting position and returning position of the sulfuric acid solution are made suitable, thus the production efficiency of persulfuric acid ions is improved. COPYRIGHT: (C)2007,JPO&INPIT
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