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发明名称
VERFAHREN ZUR REINIGUNG DER KAMMER EINER ZUR HERSTELLUNG VON ORGANISCHEN ELEKTROLUMINESZENZELEMENTEN VERWENDETEN VAKUUMAUFDAMPFANLAGE
摘要
申请公布号
DE60309036(T2)
申请公布日期
2007.02.22
申请号
DE20036009036T
申请日期
2003.06.19
申请人
ASAHI GLASS CO. LTD.
发明人
HAYASHI, NOBUYA;NARUI, SHINICHIRO;OKAMOTO, HIDEKAZU;TSUZAKI, MASAAKI
分类号
C11D7/28;B08B3/14;C11D3/24;C11D7/30;C11D7/50;C11D11/00;C23C14/00;C23C14/12;C23C14/56;H01L51/30;H01L51/40;H01L51/56;H05B33/10;H05B33/14
主分类号
C11D7/28
代理机构
代理人
主权项
地址
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