| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning apparatus for accurately positioning devices installed in different vacuum chambers to predetermined relative positions, moreover a positioning apparatus for accurately positioning an exposure device body and a light source device of the exposure apparatus used for manufacturing a semiconductor device to the predetermined relative positions, and an exposure apparatus comprising such a positioning apparatus, and also to provide a device manufacturing method using the exposure apparatus. <P>SOLUTION: In the positioning apparatus, at least either of a first apparatus and a second apparatus is accommodated in the chamber, and a relative positioning function is also provided between the first apparatus and the second apparatus. The relative position is measured as at least one degree of freedom between the first apparatus and the second apparatus. <P>COPYRIGHT: (C)2007,JPO&INPIT |
