| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a housing container for a pellicle in which a mounting member to dispose a pellicle support frame is made less likely to be detached from the container. <P>SOLUTION: The housing container 1 for a pellicle for transporting a pellicle 5 comprising a pellicle film 6 and a support frame 7 supporting the pellicle film 6 comprises a tray 3, a cover 2 as a lid of the tray, a recess 30b formed inside the tray 3, and a mounting member 4 made of a material having higher rigidity than the tray 3 for mounting the support frame 7, wherein the mounting member 4 is fitted and arranged in the recess 30b. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
