| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an improved rotary valve reducing the influence of an intra-valve leakage on PAS performance. <P>SOLUTION: The rotary valve comprises (a) a rotor having a rotor face rotatable about an axis perpendicular to the rotor face, a plurality of openings, and at least one passage connecting at least one pair of the plurality of openings; (b) a stator having a stator face in sealing contact with the rotor face to form a planar rotary valve seal with an outer periphery, wherein at least one of a plurality of openings in the stator face that are connected to respective passages through the stator, and the passages through the stator is a stator vacuum passage directly connected to a vacuum pump; (c) a sealed valve chest having an interior volume adjoining the outer peripheral edge of the rotary valve seal, and sealed from the atmosphere surrounding the rotary valve; and (d) a vacuum vent passage connected to the sealed valve chest. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
