| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece holding device for spin dryers wherein no cleaning water is left in the corner of the vicinity of its contacting portion with the workpiece. SOLUTION: The device has a spin axis, a supporting frame, a plurality of rotational pieces 42, a workpiece mounting surface 421, a workpiece sandwiching surface 422, a coil spring 414, and a scattering preventing cover which doubles as a pressing means. When a pressure receiver 425 is pressed by the upper portion 641 of the scattering preventing cover, the mounting surface 421 is so brought into an inclined state as to lie in parallel with a recessed cone surface. Consequently, the edge of the workpiece W is mounted on the mounting surface 421 held in this state. When the upper portion 641 of the scattering preventing cover releases the pressing of the pressure receiver 425, the edge of the workpiece W so climbs along the mounting surface 421 that it stops by its contacting with the workpiece sandwiching surface 422 and that the workpiece W is held. COPYRIGHT: (C)2007,JPO&INPIT |
