| 摘要 |
PROBLEM TO BE SOLVED: To certainly avoid contact of a probe with a sample in a scanning probe microscope and its operation method. SOLUTION: The scanning probe microscope makes the probe relatively scan a sample surface and thus measures irregularity on the sample surface. A scan reference position of the height direction is updated correspondingly to the peak value of the height information on the sample surface on a scan line scanned by then, a limit value of the relative movement of the probe in the height direction to the scan reference position is set, and next scan lines are sequentially scanned after the updating. COPYRIGHT: (C)2007,JPO&INPIT |
