| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact electrostatic capacity type pressure sensor capable of improving both yields and detection accuracy, and also to provide its manufacturing method. SOLUTION: The electrostatic capacity type pressure sensor is provided with a base material 2 having a first electrode 7 in a surface part 2a; a diaphragm 3 opposed to the surface part 2a of the base material 2 and having a second electrode 13 opposed to the first electrode 7; a ring-like inside spacer member 4 arranged between the base material 2 and the diaphragm 3 for specifying the opposition interval between the first electrode 7 and the second electrode 13 and surrounding an opposing part between the first electrode 7 and the second electrode 13; a ring-like outside spacer member 5 surrounding the outside of the inside spacer member 4; and a joint member 6 in a state buried between the inside spacer member 4 and the outside spacer member 5 to join the base material 2 and the diaphragm 3 to each other. An airtight chamber 14 airtightly sealed by the joint member 6 is provided between the base material 2, the diaphragm 3 and the inside spacer member 4. COPYRIGHT: (C)2007,JPO&INPIT
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