| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer moving device capable of moving a wafer efficiently and stably. SOLUTION: A control circuit CPU drives a motor 5 so that passing speed is changed in a wafer lift 8 according to the relative position between a wafer holder 11 and a pin 12. When the pin 12 is separated from the wafer holder 11, the passing speed is increased in the wafer lift 8 for shortening waiting time. When the pin 12 approaches the wafer holder 11, the passing speed is decreased in the wafer lift 8, thus preventing the positional displacement of the wafer W from occurring when the wafer W is delivered between the pin 12 and the wafer holder 11, and preventing the wafer W from falling. COPYRIGHT: (C)2007,JPO&INPIT
|
