摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate with a transparent conductive film capable of forming a transparent conductive film having an excellent uniformity at low cost, when a transparent conductive film having high crystallinity and low resistance is installed on a substrate with inferior thermal resistance. SOLUTION: The manufacturing method of a substrate with transparent conductive film having a transparent conductive film on one face of a first substrate, comprises a process A in which a transparent conductive film is formed on one face of a second substrate using the second substrate having a higher thermal resistance than the first substrate, a process B in which the transparent conductive film is pasted on one face of the first substrate through an adhesion means, and a process C in which, using a removal means of removing only the second substrate, a laminate consisting of the first substrate, the adhesion means, and the transparent conductive film is left remaining, at least in that order. COPYRIGHT: (C)2007,JPO&INPIT
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