| 摘要 |
PROBLEM TO BE SOLVED: To provide a working method where dimples of high precision in which shape precision is severalμm or below, and surface roughness is like a specular face are formed on the surface of a work with high efficiency. SOLUTION: A force detector is coupled with an indenter in series, and indentation force is made detectable, thus the detection of the contact starting position between a penetrator and the surface of a work and the control of the maximum indentation load are performed, and the stroke of an indentation cycle is made the minimum, so as to be able to form dimple faces of high precision with high efficiency. COPYRIGHT: (C)2007,JPO&INPIT
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