发明名称 |
Microelectromechanical switches having mechanically active components which are electrically isolated from components of the switch used for the transmission of signals |
摘要 |
A plate-based microelectromechanical system (MEMS) switch is provided which includes a moveable plate suspended above a substrate and a plurality of arms extending from the periphery of the moveable plate. The moveable plate includes a first electrode suspended over a second electrode arranged on the substrate and a first input/output signal contact structure electrically isolated from the first electrode. In some embodiments, the first input/output signal contact structure is arranged proximate to the edge of the moveable plate. In addition or alternatively, one of the arms is electrically coupled to the first input/output signal contact structure and comprises an input/output signal trace. A cantilever-based MEMS switch is provided which includes a cantilever structure with a first electrode suspended a second electrode arranged upon a substrate. In addition, the cantilever structure includes an input/output signal line spaced apart from the first electrode and arranged above an input/output signal contact structure.
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申请公布号 |
US2007040637(A1) |
申请公布日期 |
2007.02.22 |
申请号 |
US20050207324 |
申请日期 |
2005.08.19 |
申请人 |
YEE IAN Y K;FLYNN WILLIAM G |
发明人 |
YEE IAN Y.K.;FLYNN WILLIAM G. |
分类号 |
H01H51/22 |
主分类号 |
H01H51/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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