| 摘要 |
A variable-shape mirror has a support substrate, a mirror portion that faces the support substrate and that has a mirror surface on the side thereof opposite to the side thereof facing the support substrate, a plurality of fixing portions that fix the mirror portion to the support substrate, and a plurality of driving portions that deform the mirror surface by expanding and contracting between the support substrate and the mirror portion. On the support substrate, elevations are formed to serve as bonding surfaces bonded to the fixing portions, as electrodes bonded to the driving portions to feed voltages thereto, and as conductors electrically connected to the electrodes.
|
