USING ZEOLITES TO IMPROVE THE MECHANICAL STRENGHT OF LOW-K INTERLAYER DIELECTRICS
摘要
A method for impregnating the pores of a zeolite low-k dielectric layer with a polymer, and forming an interconnect structure therein, thus mechanically strengthening the dielectric layer and preventing metal deposits within the pores.
申请公布号
WO2006058009(A3)
申请公布日期
2007.02.22
申请号
WO2005US42333
申请日期
2005.11.17
申请人
INTEL CORPORATION;BOYANOV, BOYAN;KLOSTER, GRANT;GOODNER, MICHAEL
