| 摘要 |
<p>This invention provides a method for operating a silicon electromagnetic casting apparatus in which ingot surface temperature and heating furnace temperature are measured and, further, induction frequency control for electromagnetic casting has been taken into consideration. In this method, the power supply output of heating means is controlled based on the measured value of the surface temperature of the solidified silicon, and, at the same time, the induction power supply output is controlled based on the measured value of the induction frequency of an induction coil power supply. According to the above constitution, in continuously casting a silicon ingot, excellent safety and productivity can be ensured. Thus, the method facilitates the production of polycrystalline silicon ingots for semiconductors and can be widely applied for stable operation.</p> |
