| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-Y stage of a low profile. <P>SOLUTION: This X-Y stage S is equipped with first and second plates 1 and 2 each having a flat surface and provided opposite to each other, a first movement means 3 mounted on the first plate 1 for providing movement in the X axis direction of the first plate 1, a second movement means 5 mounted on the first plate 1 for providing movement in a Y axis direction making a right angle with the X axis direction of the first plate 1, a first movable body 4 mounted on the second plate 2 and moved by the movement means 3, and a second movable body 6 mounted on the second plate 2 and moved by the movement means 5. <P>COPYRIGHT: (C)2007,JPO&INPIT |
