| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enhance production control, quality control, and production efficiency of the laser machining by monitoring the actual laser output state, the machining state or the state of the optical system on a laser machining head side in an optical fiber transmission system by a highly reliable in-line method. <P>SOLUTION: In a laser machining monitoring device, an optical fiber 14 for laser transmission, a laser beam detector 26 for monitoring, and a reflected beam detector 28 are mounted on the top surface of a laser machining head 12. A beam diffusion plate 44 diffuses the beam-shaped leaking beams M<SB>LB</SB>from a bent mirror 34 being a part of laser beams LB emitted from the terminating face 14a of the optical fiber 14 at a random angle with respect to the angle of incidence, and passes the beams M<SB>LB</SB>backwardly. The beam M<SB>LB</SB>' passing through the beam diffusion plate 44 is made a diffusion beam M<SB>LB</SB>' having the radially uniform power density distribution in a beam passage 45, and a part of the diffusion beams M<SB>LB</SB>' is incident on the beam receiving surface 26a of the beam detector 26. Even in a reflected beam measurement system, a beam diffusion plate 35 performs the similar effect to the beam diffusion plate 44 with respect to the reflected laser beam R<SB>LB</SB>from a work W. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
