| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device for a liquid crystal panel that can efficiently clean a liquid crystal material sticking between substrates outside a seal, while lowering the degree of contamination of waste liquid, and to provide a manufacturing method for a liquid crystal device that includes a cleaning stage that uses the cleaning device. SOLUTION: The cleaning device for the liquid crystal panel is equipped with a predip tank which contains a cleaning agent, an ultrasonic cleaning tank contains a cleaning agent, a rinse tank which contains pure water, an ultrasonic rinse tank which contains pure water, and a high-temperature rise tank which contains pure water, having temperature higher than that of pure water in the ultrasonic rinse tank. COPYRIGHT: (C)2007,JPO&INPIT
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