发明名称 MEASURING METHOD AND MANUFACTURING SYSTEM FOR ORGANIC MOLECULAR MEMBRANE
摘要 PROBLEM TO BE SOLVED: To measure carbon atoms in an organic molecular membrane or a thickness of the organic molecular membrane with high sensitivity, using STM. SOLUTION: In the measuring method, an organic molecule is adsorbed on a substrate surface constituted of a ferromagnetic metallic element, and an LDOS localized in the carbon atom composing the organic molecule. The carbon atoms are measured from the distribution of the LDOS, and the thickness is measured from the size of the LDOS. By making the substrate is made of the ferromagnetic metal, the LDOS to be large, which is localized in the carbon atom adsorbed on the substrate, thereby carrying out the measurement with high sensitivity. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007047123(A) 申请公布日期 2007.02.22
申请号 JP20050234459 申请日期 2005.08.12
申请人 FUJITSU LTD 发明人 TANIDA YOSHIAKI
分类号 G01B7/06;G01Q60/10 主分类号 G01B7/06
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