| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor that can seal a closed chamber for storing a detection section in a high vacuum state, can reduce size and costs, can improve the degree of freedom in a device, and has no restriction by the influence of heat; and to provide electronic equipment and a method of manufacturing the physical quantity sensor. SOLUTION: The physical quantity sensor comprises the closed chamber maintained in a vacuum state, a movable section stored in the closed chamber, and the detection section for detecting dynamic quantity operated from the outside. The method of manufacturing the physical quantity sensor includes an evacuation process for evacuating the inside of the closed chamber from a through hole provided at one portion in the closed chamber, and a vacuum sealing process for blocking the through hole. In the evacuation process and/or the vacuum sealing process, the degree of vacuum in the closed chamber is monitored. COPYRIGHT: (C)2007,JPO&INPIT
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