| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor system capable of suppressing changes due to aging of offset voltage, while being low cost. SOLUTION: The magnetic sensor 1 detects a variation in magnetism from the variation of electric resistance value of each magnetoresistive element 31 to 34, according to magnetic variation. Each magnetoresistive element 31 to 34 is covered with a protective film (inter-layer insulating film 40 and passivation film 60). Part of the protective film (inter-layer insulating film 40 and passivation film 60) is removed by etching and an opening 61 is formed. COPYRIGHT: (C)2007,JPO&INPIT
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