发明名称 |
System and method for electronic diagnostics of a process vacuum environment |
摘要 |
In one embodiment according to the invention, there is disclosed a method of identifying a source of a vacuum quality problem in a vacuum environment associated with a tool. The method comprises gathering and storing vacuum environment data; identifying an anomaly within the vacuum environment; determining a tool component operating state when the anomaly likely occurred; and determining the source of the vacuum quality problem based on a state of the vacuum environment when the anomaly likely occurred and the tool component operating state when the anomaly likely occurred.
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申请公布号 |
US2007043534(A1) |
申请公布日期 |
2007.02.22 |
申请号 |
US20050206675 |
申请日期 |
2005.08.18 |
申请人 |
ARRUDA JOSEPH D;KEAY KATHLEEN D;GILCHRIST GLEN F R |
发明人 |
ARRUDA JOSEPH D.;KEAY KATHLEEN D.;GILCHRIST GLEN F.R. |
分类号 |
G06F11/30 |
主分类号 |
G06F11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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