发明名称 |
THIN FILM INTERFERENCE FILTER AND BOOTSTRAP METHOD FOR INTERFERENCE FILTER THIN FILM DEPOSITION PROCESS CONTROL |
摘要 |
A thin film interference filter system includes a plurality of stacked films having a determined reflectance; a modeled monitor curve; and a topmost layer configured to exhibit a wavelength corresponding to one of the determined reflectance or the modeled monitor curve. The topmost layer is placed on the plurality of stacked films and can be a low-index film such as silica or a high index film such as niobia.
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申请公布号 |
WO2006031733(A3) |
申请公布日期 |
2007.02.22 |
申请号 |
WO2005US32420 |
申请日期 |
2005.09.13 |
申请人 |
THE UNIVERSITY OF SOUTH CAROLINA;MYRICK, MICHAEL, L. |
发明人 |
MYRICK, MICHAEL, L. |
分类号 |
G01B11/02 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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