A CHEMICAL MECHANICAL POLISHING CARRIER BEING ABLE TO POLISH THE WAFER WITHOUT THE ADJUSTMENT OF THE RETAINER RING,申请号KR20050037375-传众专利搜索

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发明名称	A CHEMICAL MECHANICAL POLISHING CARRIER BEING ABLE TO POLISH THE WAFER WITHOUT THE ADJUSTMENT OF THE RETAINER RING
摘要
申请公布号	KR100685284(B1)	申请公布日期	2007.02.22
申请号	KR20050037375	申请日期	2005.05.04
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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