| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser projection apparatus which can keep a projection magnitude constant, and correctly focus and form an image of a mask on a substrate even if the focus distance or the like of a projection lens varies because of temperature change of the projection lens by a laser light. <P>SOLUTION: A mask distance (a) is adjusted by a magnitude control unit 20 and a mask movement servo control unit 10, and a substrate distance (b) is adjusted by a focusing control unit 50, an AFC control unit 40, and a table movement servo control unit 30. Thus, a ratio of a/b is kept constant and an equation of 1/f=1/a+1/b is satisfied. <P>COPYRIGHT: (C)2007,JPO&INPIT |
