| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a beam position monitor capable of measuring highly accurately the center position of a high energy beam such as a large-output synchrotron radiation, excimer laser light and an X-ray, and operating stably for a long period, and manufacturable at lower cost than a conventional one, and a beam position measuring method. <P>SOLUTION: A surface electrode group 2 comprising a plurality of strip electrodes 2a, current distribution layers 3a, 3b comprising a low-resistance diamond and connected respectively to both ends of each strip electrode 2a, and signal drawing electrodes 4a, 4b connected respectively to both ends of the current distribution layers 3b, 3b are formed on one surface of a high-resistance diamond layer 1. A back electrode is formed on a domain on the opposite side of a domain where the surface electrode group 2 is formed, on the other surface of the high-resistance diamond layer 1. A bias electric field is applied between the surface electrode group 2 and the back electrode, and a carrier generated in a detection part 5 is collected by the surface electrode group 2, and outputted from the signal drawing electrodes 4a, 4b via the current distribution layers 3a, 3b. <P>COPYRIGHT: (C)2007,JPO&INPIT |
