MANUFACTURING METHOD FOR ELECTRO-OPTICAL DEVICE, AND WASHING DEVICE FOR ELECTRO-OPTICAL PANEL

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for an electro-optical device by which the electro-optical device suppressive in display unevenness can efficiently be manufactured, by preventing spacers from cohering due to ultrasonic cleaning, and to provide a cleaning device for an electro-optical panel that can perform such ultrasonic cleaning. SOLUTION: The manufacturing method includes the stages of: scattering spacers on at least one of a pair of substrates; forming the electro-optical panel by sticking the pair of substrates together; and putting the electro-optical panel in washing liquid and washing the electro-optical panel while applying ultrasonic vibrations of variable frequency to the washing liquid. COPYRIGHT: (C)2007,JPO&INPIT