| 摘要 |
PROBLEM TO BE SOLVED: To provide a ramping stage capable of improving precision. SOLUTION: The ramping stage A comprises a base 1, a plate 2 provided opposite to the base 1, an energizing means 3 for energizing so that the plate 2 and the base 1 approach, a groove 4 provided on the side of the base 1 facing the plate 2 formed in arc shape, at least 2 spherical bodies 5 provided apart at a portion of the plate 2 facing the groove 4 and touching and sliding on the groove 4, and a moving means 6 for moving the plate 2 along the groove 4 formed in arc shape. COPYRIGHT: (C)2007,JPO&INPIT
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