| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid heating device capable of efficiently producing a heated fluid such as stable saturated steam of high quality or temperature-controlled superheated steam by controlling temperature so as not to cause trouble due to dryout or the like. SOLUTION: Independent control of a first heater 16a based on the detected temperature of a first pipeline upstream side temperature detector 17 and a second heater 16b based on the detected temperature of a first pipeline downstream side temperature detector 18 or a first fluid temperature detector 12 is performed by a microcomputer 13 to allow the respective heaters 16a, 16b to cope with the change of specific heat, heat conduction, or the like of a fluid following a phase change. Trouble due to dryout or the like is thereby prevented from arising in a first heating part 11, and the phase change of the fluid can be efficiently performed. Further, the heated fluid of stable temperature and flow can be positively produced by the independent control of the respective heaters 16a, 16b. COPYRIGHT: (C)2007,JPO&INPIT
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