| 摘要 |
PROBLEM TO BE SOLVED: To provide a boat for vapor deposition capable of preventing a melted evaporation material from sticking to an electrode fitting part caused by its wet spreading without complicating the temperature control and fabrication of the boat, thereby suppressing the occurrence of pinholes or the like. SOLUTION: The boat 11 for vapor deposition comprises: a boat body 12 composed of a resistance heating element; electrode fitting parts 13 respectively provided on both the edge parts of the boat body 12; and a cavity (material receiving part) 14 located almost at the center of the surface in the boat body 12 and receiving the feed of an evaporation material. By forming a plurality of groove parts 15 extentionally present in a direction crossed with a direction going from the cavity 14 to each electrode fitting part 13 in a region between the cavity 14 and each electrode fitting part 13 which is the surface of the boat body 12, the fluidization of the evaporation material going from the cavity 14 to each electrode fitting part 13 is damped up, so as to regulate the arrival of the evaporation material at each electrode fitting part 13. COPYRIGHT: (C)2007,JPO&INPIT
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