发明名称 METHOD AND APPARATUS FOR MONITORING THICKNESS OF CONDUCTIVE COATING
摘要 <p>A method and apparatus for determining thickness of a metallic layer being deposited on a collector. The method includes applying an electromagnetic field to a conductive layer on the collector. Then the temperature or the change in temperature of the collector is determined. The metal thickness is determined as a function of the temperature or change in temperature. The apparatus includes a collector, a thermocouple associated with the collector, and a source of an electromagnetic field.</p>
申请公布号 WO2007021350(A2) 申请公布日期 2007.02.22
申请号 WO2006US19913 申请日期 2006.05.24
申请人 TOKYO ELECTRON LIMITED;BRCKA, JOZEF 发明人 BRCKA, JOZEF
分类号 G01N25/00 主分类号 G01N25/00
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