| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement quantity measuring instrument capable of measuring displacement quantity with high precision when tension is applied to a fine test piece, and to provide a displacement quantity measuring method using it. SOLUTION: The displacement quantity measuring instrument is equipped with a multiprobe (1) having first and second cantilevers (11 and 12) having chips (T) formed to the leading end parts thereof, a detection part for detecting a change in the shapes of the first and second cantilevers (11 and 12), a scanner for scanning the multiprobe (1), a control part for controlling the scanner and a tensile mechanism for applying tension to the test piece (2). Before and after tension is applied to the test piece (2) having a plurality of projections 22 formed to its surface at equal intervals, the scanner is controlled by the control part and the surface of the test piece (2) is scanned along the arranging direction of the projections 22 over a predetermined distance using the multiprobe (1). The detection part acquires the surface height data of the test piece (2) from the change in the shapes of the first and second cantilevers (11 and 12) due to the positional displacement of the chips (T). COPYRIGHT: (C)2007,JPO&INPIT
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