摘要 |
PROBLEM TO BE SOLVED: To allow any person to adjust easily an inclination of an optical axis of an inspected lens, and to measure precisely an eccentric level caused by a lateral shift of the inspected lens, with satisfactory reproducibility. SOLUTION: This instrument 1 for measuring the eccentricity of the lens is provided with an optical axis measuring means 4 for measuring the inclination of the optical axis of the lens R with respect to a rotation axis X, a position regulating means 5 for regulating a holding position of the lens R to conform the optical axis with the rotation axis X, based on an optical axis measured result, a lateral shift measuring means 6 for measuring a deviation amount in an outer circumferential face of the lens R with respect to a rotation axis X, and a control means 7 for controlling the respective means, and the position regulating means 5 is provided with a rough moving mechanism 41 for moving roughly the lens R via a rod-like member 40, and a fine moving mechanism 43 having a piezoelectric element 42, and for moving finely the lens R via the rod-like member 40, and the control means 7 calculates a moving amount of the lens R, based on the optical axis measured result, and impresses a voltage to the piezoelectric element 42 to move the rod-like member 40 by an amount provided by subtracting a rough moving amount from the calculated moving amount, after the rough moving is finished. COPYRIGHT: (C)2007,JPO&INPIT
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