| 摘要 |
PROBLEM TO BE SOLVED: To provide a droplet discharge head which can reduce the size and increase the density and the number of rows of nozzles, discharge chambers, etc. SOLUTION: The droplet discharge head comprises: a nozzle substrate 5 in which a plurality of nozzle holes 16 which discharge droplets are formed; a silicon-made cavity substrate 3 on which a plurality of recessed portions which have bottom walls constituting oscillation plates 11 and serve as the discharge chambers 12 retaining discharge droplets; an electrode substrate 2 in which a common electrode 7 opposed to the oscillation plates 11 via gaps is formed; a reservoir substrate 4 having a recessed portion serving as a reservoir 13 which supplies the droplets to the discharge chambers 12, supply outlets 14 for transporting the droplets from the reservoirs 13 to the discharge chambers 12, and a nozzle communication hole 15 which transports the droplets from the discharge chambers 12 to the nozzle hole 16; and a driver IC 18 fabricated in the cavity substrate 3 which electrostatically drive the oscillation plates 11. The common electrode 7 is sealed in the droplet discharge head. COPYRIGHT: (C)2007,JPO&INPIT
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