发明名称 Packaging of electronic chips with air-bridge structures
摘要 A circuit assembly for fabricating an air bridge structure and a method of fabricating an integrated circuit package capable of supporting a circuit assembly including an air bridge structure. A circuit assembly comprises an electronic chip and a conductive structure embedded in a plurality of materials having a plurality of vaporization temperatures. The plurality of materials is formed on the electronic chip and the conductive structure is coupled to the electronic chip. To fabricate the circuit assembly, a support structure, including interstices, is formed on an electronic chip. The interstices of the support structure are filled with a material having a vaporization temperature that is less than the vaporization temperature of the support structure. Conductive structures are embedded in the support structure and the material, and a connective structure is mounted on the support structure. Finally, the material is removed from the interstices by heating the circuit assembly.
申请公布号 US2007042595(A1) 申请公布日期 2007.02.22
申请号 US20060586876 申请日期 2006.10.26
申请人 MICRON TECHNOLOGY, INC. 发明人 FARRAR PAUL A.
分类号 H01L21/44;H01L21/768;H01L23/20;H01L23/48;H01L23/495;H01L23/522;H01L23/532;H01L23/66;H01L29/00 主分类号 H01L21/44
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