发明名称 |
Sensor device and stage device |
摘要 |
According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.
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申请公布号 |
US2007041024(A1) |
申请公布日期 |
2007.02.22 |
申请号 |
US20060588271 |
申请日期 |
2006.10.27 |
申请人 |
TOHOKU TECHNOARCH CO., LTD. |
发明人 |
GAO WEI;KIYONO SATOSHI;TOMITA YOSHIYUKI;HIRATA TORU;WATANABE YOJI;MAKINO KENNICHI |
分类号 |
G01B11/14;G01B11/00;G01D5/28;G01D5/38;G03F7/20;H01L21/027;H01L21/68 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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