| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an actuator apparatus capable of excellently keeping piezoelectric characteristics of a piezoelectric layer, and of preventing an upper electrode from being peeled; and also to provide an actuator apparatus, a liquid injection head, and a liquid injection apparatus. <P>SOLUTION: The manufacturing method comprises a process of forming a vibration plate on a substrate; and a process of forming the piezoelectric element 300 composed of a lower electrode, the piezoelectric layer, and an upper electrode, by laminating and patterning the lower electrode 60, piezoelectric layer 70, and upper electrode 80. Further, the method comprises an upper electrode forming process wherein the process of forming the piezoelectric element includes a deposition process of depositing the upper electrode on the piezoelectric layer such that film stress of the upper electrode ranges from 1 to 2 (GPa), and a post annealing process of subjecting at least the upper electrode to heating processing at a temperature of 500 to 700°C. <P>COPYRIGHT: (C)2007,JPO&INPIT |
