| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin-film piezoelectric resonator capable of improving resonance characteristics and reducing size. <P>SOLUTION: The thin-film piezoelectric resonator 1 comprises a substrate 2 having a cavity 2H, a first electrode 5 on the cavity 2H, a piezoelectric body 6 on the first electrode 5, and a second electrode 7 on the piezoelectric body 6. One portion 71 of the periphery of the second electrode 7 is overlapped to the cavity 2H for arrangement, an interior angleθformed by an end face at one portion 71 of the periphery of the second electrode 7 and the bottom surface is set to 30°or smaller. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
