| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control device in a vacuum vessel where a member can be controlled to the vicinity of a set temperature or below the set temperature in a vacuum vessel, and to provide a thin film deposition method. SOLUTION: The temperature control device in a vacuum vessel performing prescribed treatment in a vacuum atmosphere has a structure where the inside of a member 8 composing the vacuum vessel involves a phase change material 11 having a melting point in the vicinity of the treatment temperature. At this time, the phase change material is composed of a low melting point alloy essentially consisting of any element selected from In, Sb, Bi and Pb, and having a melting point of about 10 to 327°C. COPYRIGHT: (C)2007,JPO&INPIT
|
