| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for chamfering a wafer, which apparatus can simplify its mechanism, and also can carry out very precise and stable chamfering work. SOLUTION: In the chamfering apparatus 10 for machining the outer peripheral portion of the wafer W mounted on a rotating wafer table 34 into a required shape by a rotating grinding wheel, the mechanism of the chamfering apparatus 10 can be simplified, and also the precise and stable chamfering work can be carried out by means of a combined grinding wheel 80 integrally formed of rough grinding wheels 51, 90, 91, 92 for rough-grinding the wafer W and truing grinding wheels 52, 85, 86, 87. COPYRIGHT: (C)2007,JPO&INPIT
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