| 发明名称 |
Method and system for producing optically transparent noble metal films |
| 摘要 |
A method and system for producing a noble metal film includes the step of sputtering a noble metal on a substrate thus obtaining a film. The method and system further includes the step of subjecting the film to a thermal treatment, thus obtaining the noble metal film.
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| 申请公布号 |
US2007042195(A1) |
申请公布日期 |
2007.02.22 |
| 申请号 |
US20060415843 |
申请日期 |
2006.05.01 |
| 申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
CONOCI SABRINA;PETRALIA SALVATORE |
| 分类号 |
B32B15/00;C23C14/00;C23C14/32 |
主分类号 |
B32B15/00 |
| 代理机构 |
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