| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To transport a pellicle without causing deformation in an adhesive material of a support frame for a pellicle that is to be housed therein. <P>SOLUTION: The housing container 1 for a pellicle for transporting a pellicle 5 comprising of a pellicle film 6 and a support frame 7 supporting the pellicle film 6 includes a tray 3, a cover 2 as a lid of the tray, and one or more mounting parts 4 inside either the tray 3 or the cover 2 for mounting the support frame 7, with the portion to mount the support frame being inclined with respect to the bottom face of the support frame 7. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
